Low Pressure Chemical Vapor Deposition (LPCVD) Machine MM650
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LPCVD machine, with mature and stable process, is one of the earliest machine for mass production of TOPcon cells
Capacity:
9400PCS/hour @182*182 cell
High average yield, good film uniformity
Our own patented air inlet system improves the uniformity and controllability of the flow field
High yield
the uniform flow of air leads to even film and high yield.
Long service life of quartz tube:
6 months of quartz tube life due to innovative quartz tube fixing design and low air consumption.
Stable temperature zone:
the reasonable layout of heating filaments contributes to good consistency and controllability, resulting in stable and controllable temperature zones.
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